| KLA Surfscan SP1 DLS / TBI | ||||||
| Tools | OEM PN | NEW OEM PN | Description | |||
| SP1 TBI | 0224471-000 | ASSY , LASER , ARGON , 30MW , TESTED | ||||
| SP1 TBI | 536091 | Beam Splitter Assy., TBI | ||||
| SP1 TBI | 168807 | Power Supply for SP1 TBI Laser Head, 30mW | ||||
| SP1 TBI | 0060463-000 | (FRU , ASSY , ACAL - PIN , SP1 - TBI / TQM) | ||||
| SP1 DLS | 0278424-000 | ASSY , ARGON , 75mW , FSB , SP1 - DLS | ||||
| SP1 DLS | 0029941-001 | PWR SUPPLY , LASER , 75 MW , SP1 - DLS | ||||
| SP1 DLS | 0060464-000 | Auto cal Pin (Pin only), DLS | ||||
| SP1 TBI & DLS | 349437 | ISOLATOR , OPTICAL , 488NM , SP1 | ||||
| SP1 TBI & DLS | 509167 | Isolator Assy (Isolator WITH mounting bracket and base Plate) | ||||
| SP1 TBI & DLS | 0103687-000 | SP1+ Illumination Polarizer Assembly | ||||
| SP1 DLS | 0283214-000 | FRU KIT , ASSY , BEAM SPLITTER | ||||
| SP1 TBI & DLS | 0092493-001 | Photo multiplier Tube , SP1 | ||||
| SP1 TBI & DLS | 0050753-000 | Half wave plate / Quarter wave plate Assy. | ||||
| SP1 TBI & DLS | 508250 | BPS pin (Pin only) | ||||
| SP1 DLS | 0279265-000 | Modular main low voltage power supply | ||||
| SP1 | 0023892-000 | Vacuum Chuck for 200mm & 300mm wafer | ||||
| KLA Surfscan SP2 | ||||||
| Tools | OEM PN | NEW OEM PN | Description | |||
| SP2 | 0235019-000 | 0113630-000 | Laser Head , UV , 355nm , 350mW , T sesam mo | |||
| SP2 | 0113630-000 | LASER HEAD , UV , 355MW , UNCOATED SEASAM | ||||
| SP2 | 0092416-001 | POWER SUPPLY W/DIODE , UV LASER , J40 355MW | ||||
| SP2 | 0253452-000 | FRU , ATTENUATOR ASSY , HALF-WAVE , EC , SP2 | ||||
| SP2 | 0220037-001 | SP2 Normal Channel M1/M2 Mirror | ||||
| SP2 | 0253457-000 | FRU , FOLD MIRR , 90 DEG , INCIDENT , EC , SP2 | ||||
| SP2 | 0255764-000 | 0253457-000 | FRU , OLD FOLD MIRR , 90 DEG , SP2 | |||
| SP2 | 0253311-000 | ASSY , SERVO - MIRROR , SAPPHIRE , BSS , EC , SP2 | ||||
| SP2 | 0253453-000 | FRU , CHANGER ASSY , QTR / HALF - WAVE , EC , SP2 | ||||
| SP2 | 0214553-001 | 0253453-000 | FRU , Changer ASSY , QTR / Hal f- WAVE SP2 | |||
| SP2 | 0253458-000 | FRU , ROTATOR ASSY , HALF - WAVE , EC , SP2 | ||||
| SP2 | 0253755-000 | FRU , BSC ASSY , NRML / OBL CHNL , EC , SP2 | ||||
| SP2 | Beam Pick - off set (2pcs), Quad - Cells , SP2 | |||||
| SP2 | 0253456-000 | FRU , MIRROR , PICK-OFF , QC1, EC , SP2 | ||||
| SP2 | 0278802-000 | FRU , MIRROR , PICK-OFF , QC2 , EC , SP2 | ||||
| SP2 | 0259855-000 | FRU , L1A , L1B , L1-L2 ASSY , EC , SP2 | ||||
| SP2 | 0220038-001 | 0259855-000 | FRU , L1A , L1B , L1-L2 ASSY , SP2 | |||
| SP2 | 0108009-002 | L1/L2/SPATIAL FILTER ASSY. SP2 | ||||
| SP2 | 0065817-001 | MIRROR , DUMP , BPS , SP1-UV | ||||
| SP2 | 0214580-001 | BPS ND Filter Assembly | ||||
| SP2 | 0092493-001 | Photo Multiplier Tube, SP2 | ||||
| SP2 | Chamber Pressure Monitor | |||||
| KLA PUMA 91 xx | ||||||
| Tools | OEM PN | NEW OEM PN | Description | |||
| PUMA 91xx | 0233215-000 | LASERHEAD , 2.5W , 355NM , 'T'MOUNT , GEN 3 | ||||
| PUMA 91xx | 01017802-000 | POWER SUPPLY with DIODE, UV LASER, J40 | ||||
| 価格はお問合せ下さい | ||||||