| RPS (Remote Plasma Source) 修理 ・ オーバーホール リスト | |||||
| 品種 | メーカー | Parts Number | Model Name | 使用装置 | |
| RPS | MKS Astron-TM (2L ) | 0920-00013 | FI20620 | AMT Producer/AKT | |
| RPS | MKS Astron-TM (2L ) | 0920-00013 | AX7651 | AMT Producer/AKT | |
| RPS | MKS Astron-TM (2L ) | 0929-00013 | AX7657 | AMT Producer/AKT | |
| RPS | MKS Astron-TM (2L ) | 0920-01120 | AX7650 | AMT Producer/AKT | |
| RPS | MKS Astron-TM (2L ) | FI20120 | AMT Producer/AKT | ||
| RPS | MKS Astron-TM (2L ) | FI26201 | AMT Producer/AKT | ||
| RPS | MKS Astron-TM (2L ) | AX7851 | AMT Producer/AKT | ||
| RPS | MKS Astron-I (3L) | 0920-00100 | AX7670 | AMT Producer/AKT | |
| RPS | MKS Astron- ex (4L) | FI80130 | AMT Producer/AKT/NOVELLUS | ||
| RPS | MKS Astron- ex (6L) | 0920-00057 | FI80131 | AMT Producer/AKT/NOVELLUS | |
| RPS | MKS Astron- ex (6L) | FI80133 | AMT Producer/AKT/NOVELLUS | ||
| RPS | MKS Astron- ex (8L) | FI80132 | AMT Producer/AKT/NOVELLUS | ||
| RPS | MKS Astron- ex (8L) | AX7685 | AMT Producer/AKT/NOVELLUS | ||
| RPS | MKS Astron- hf (15L) | 0190-72072 | FI80146 | AKT | |
| RPS | MKS Astron- hf - s (15L) | 27-282770-00 | AX7645 | Novellus | |
| RPS | MKS Astron- hf + (22L) | AX7635 | |||
| RPS | AE | AE RPS (6L) | |||
| RPS | AE | AE X-stream RPS (8L) | |||
| RPS | AE | AE Stellar RPS (8L) | |||
| RPS | Reactor NPR-6L | Reactor NPR-6L | |||
| RPS | NPG-12KM | NPG-12KM | |||
| RPS | NPG-15KM | NPG-15KM | |||
| RPS | NPG-16KM | ||||
| リストに無い型番もお問い合わせ下さい。 | |||||