PRI -　Brooks	ロボット　修理　/　オーバーホール　/　Exchangeリスト
メーカ	型式	使用装置
PRI -Brooks	ATM-100
PRI -Brooks	ATM-105	KLA_OP2000/3290DV ; Thermawave ; August
PRI -Brooks	ATM-107	KLA_Tencor
PRI -Brooks	ATM-107B	ASTI_Sorter
PRI -Brooks	WTM-107B	IPEC_CMP_776  and Momentum_R1&R2
PRI -Brooks	ATM200	AMAT
PRI -Brooks	ATM-204	LAM_Autoload
PRI -Brooks	ATM-205
PRI -Brooks	ABM-205	IPEC_CMP_776  and Momentum_R3; Ebara
PRI -Brooks	ATM-207	KLA_Tencor
PRI -Brooks	ATM-305	Mattson AST-2800
PRI -Brooks	ATM-307	Mattson RTP
PRI -Brooks	ATM-405	KLA_ARCHER AIM
PRI -Brooks	ABM-405	AMAT_Producer ; AMAT_Quantum; KLA OP
PRI -Brooks	ATM-407	KLA_Surfscan, AMAT Producer
PRI -Brooks	ATM-407-B	GSI製 Wafer Repair System
PRI -Brooks	ATM-407-2A	LAM
PRI -Brooks	ABM-407	KLA; Rudolph
PRI -Brooks	VAC-407	Varian VIISta 810
PRI -Brooks	DBM-2406, DBM-2407	SEZ SP4300, Varian VIISta, FSI ANTARES
PRI -Brooks	DBM-2706	300ｍｍIMPLA
PRI -Brooks	WTM-511	AMAT-CMP wet
PRI -Brooks	PRE-200, 200B, 201,201B	For 8 " Wafer
PRI -Brooks	PRE-300, 300B, 301,301B	For 12 " Wafer
PRI -Brooks	ESC-100 シリーズ	PRI Robot_Old Type
PRI -Brooks	EDC-2400
PRI -Brooks	EDC-2800	FSI, Varian
PRI -Brooks	ESC-200 シリーズ	PRI Robot
PRI -Brooks	ATR-8_NVLS	Novellus_Vector,  Inova XT, ECP-300mm
PRI -Brooks	ATR-8_LAM	LAM_Etch_2300 Exelan
PRI -Brooks	ATR-7_NVLS	Novellus_ECP-200  mm, Sabre_300mm
PRI -Brooks	ATR-7_Arm set	Novellus_ECP-200 mm, Sabre_300mm
PRI -Brooks	AQR-7	Novellus_ECP(Process) 200mm
PRI -Brooks	AQR-7 Controller
PRI -Brooks	AQR-7_Arm Set	Novellus_ECP(Process)
PRI -Brooks	Traverser002-8761-05	Novellus_CVD
PRI -Brooks	MTR5	Novellus、Lam
PRI -Brooks	MTR5 Armset	Novellus　Lam
PRI -Brooks	MAG-7 Armset	Lam_200mm
PRI -Brooks	MAG-7 Armset	Lam_300mm
PRI -Brooks	MAG-7 Armset	Novellus_CVD _200mm
PRI -Brooks	MAG-7 Armset	Novellus_CVD _300mm
PRI -Brooks	MAG-7	Novellus_Concept 2, 3/Lam_2300
PRI -Brooks	MAG-8	AMAT Producer_GT
PRI -Brooks	MAG70	AKT
PRI -Brooks	MAG74	Anelva
PRI -Brooks	MAG70 Arm set 4300	AKT 4300
PRI -Brooks	MAG70 Arm set 5500	AKT 5500
PRI -Brooks	MAG74 Arm set	Anelva
リストに無い型番もご相談下さい。