|
PCB ・ その他 修理 ・ オーバーホールリスト |
|
|
品種 |
OEM P/N |
OEM P/N |
Description |
TOOL |
|
|
PCB |
0090-03467 |
|
0090-03467,
SYNERGY V452 SBC |
全Applied装置 |
|
|
PCB |
0190-13065 |
|
VGA BOARD |
全Applied装置 |
|
|
PCB |
0100-00782 |
|
PCB ASSY ALNALOG
INPUT |
全Applied装置 |
|
|
PCB |
0100-01894 |
|
AO BOARD |
全Applied装置 |
|
|
PCB |
0100-11002 |
|
DI / DO BOARD |
全Applied装置 |
|
|
PCB |
0100-20001 |
|
SEI BOARD |
全Applied装置 |
|
|
PCB |
0100-00011 |
|
CHOPPER DRIVER
BOARD |
全Applied装置 |
|
|
PCB |
0100-09009 |
|
BUFFER I/O BOARD |
全Applied装置 |
|
|
PCB |
0100-20068 |
|
CCD BOARD
(30074095R1) |
全Applied装置 |
|
|
PCB |
0100-76259 |
|
WAFER ORIENTER
PCB BOARD |
全Applied装置 |
|
|
PCB |
9700-4282-01 |
9701-1083-04 |
INDEXER CONTROL BOARD |
全Applied装置 |
|
|
PCB |
0100-35265 |
|
PCB TC AMP
INTERLOCK DXZ |
P5000 |
|
|
PCB |
0100-09071 |
|
PCB SBC I/O
BREAKOUT |
P5000 |
|
|
PCB |
0100-09117 |
|
PCB DI/DO FUSE
28 LINE BWCVD |
P5000 |
|
|
PCB |
0100-09006 |
|
PCB INTELLIGENT
INTERFACE |
P5000 |
|
|
PCB |
0100-09180 |
|
PCB LIQUID
SOURCE HEATER CONTROL |
P5000 |
|
|
PCB |
0090-09062 |
|
PCB THHERMAL
ELECTRIC DRIVER |
P5000 |
|
|
PCB |
0100-35058 |
|
PCB LOADLOCK
INTERLOCKS |
P5000 |
|
|
PCB |
0100-20038 |
|
PCB RELAY
CONTROL |
P5000 |
|
|
PCB |
0100-00172 |
|
PCB HE CONTROL |
P5000 |
|
|
PCB |
0190-76050 |
|
VGA Video
Controller |
全Applied装置 |
|
|
PCB |
0100-00793 |
|
VGA Video
Controller |
全Applied装置 |
|
|
PCB |
0190-75084 |
|
VGA Video
Controller |
全Applied装置 |
|
|
PCB |
0190-70102 |
|
VGA Video
Controller |
全Applied装置 |
|
|
PCB |
0100-35024 |
|
PCB CENTER
FINDER SBC |
P5000 |
|
|
PCB |
0100-00014 |
|
PCB OPTO DETECT |
P5000/Centura |
|
|
PCB |
0100-09011 |
|
PCB A/I
MULTIPLEXER |
P5000 |
|
|
PCB |
0100-00008 |
|
PCB ASSEMBLY
T.C. GAUGE MONITOR |
P5000 |
|
|
PCB |
0100-00398 |
|
PCB SYSTEM
ELECTRONICS INTERFACE (SEI) |
P5000 |
|
|
PCB |
0100-09020 |
|
PCB FUSE BOARD |
P5000 |
|
|
PCB |
0100-11001 |
|
PCB ANALOG
OUTPUT |
P5000 |
|
|
PCB |
0190-09379 |
|
WPCB ASSY, VME
CPU SYNERGY UPGRADE |
P5000 |
|
|
PCB |
0090-76110 |
|
SBC BOARD |
P5000 |
|
|
PCB |
0090-76109 |
|
ASSY ELECTRICAL
SBC SYNERGY |
全Applied装置 |
|
|
PCB |
0100-02735 |
|
VGA BOARD |
全Applied装置 |
|
|
PCB |
0100-00396 |
|
PCB ASSY ANALOG
INPUT/OUTPUT(Centura) |
全Applied装置 |
|
|
PCB |
0100-00825 |
|
Analog I/O Board |
全Applied装置 |
|
|
PCB |
0110-01995 |
|
Analog I/O Board |
全Applied装置 |
|
|
PCB |
0100-20003 |
|
PCB DIGITAL I/O
(DI/O BOARD) |
|
|
|
PCB |
0100-01321 |
|
PCB DIGITAL I/O
(DI/O BOARD) |
|
|
|
PCB |
0100-76124 |
|
PCB DIGITAL I/O
(DI/O BOARD) |
全Applied装置 |
|
|
PCB |
0190-09939 |
|
OMS BOARD REPAIR |
全Applied装置 |
|
|
PCB |
0190-05814 |
|
OMS BOARD REPAIR |
全Applied装置 |
|
|
PCB |
0190-76005 |
|
OMS BOARD REPAIR |
全Applied装置 |
|
|
PCB |
0190-01227 |
|
OMS BOARD REPAIR |
全Applied装置 |
|
|
PCB |
0100-01996 |
|
ASSY PCB SEISEI
BOARD |
全Applied装置 |
|
|
PCB |
0100-01130 |
|
CCD BOARD REPAIR
(30000896R1) |
全Applied装置 |
|
|
PCB |
0100-09196 |
0100-38032 |
ESC CONTROL
BOARD |
全Applied装置 |
|
|
PCB |
0190-09688 |
|
CENTURA,
SERIPLEX BOARD |
全Applied装置 |
|
|
PCB |
0100-35054 |
|
CENTURA, CHAMBER
INTERCONNECT BOARD |
全Applied装置 |
|
|
PCB |
0100-20084 |
|
CENTURA, MFC
INTERCONNECT BOARD |
全Applied装置 |
|
|
PCB |
0100-00957 |
|
STEEPER CONTROL BOARD |
全Applied装置 |
|
|
PCB |
0100-00426 |
|
INTERLOACK BOARD |
全Applied装置 |
|
|
PCB |
0100-20007 |
|
Pneumatuc distribution board |
全Applied装置 |
|
|
PCB |
0100-35173 |
|
SERIIPLEX POWER
DISTRIBUTION BOARD |
全Applied装置 |
|
|
PCB |
0100-09389 |
|
TC AMP INTERLOCK BOARD REPAIR (WxZ red bin) |
全Applied装置 |
|
|
PCB |
0190-76005 |
|
OMS BOARD |
全Applied装置 |
|
|
PCB |
0190-35650 |
|
SERIPLEX CONTROL BUS ASSY BD |
Centura
/(Etch/T/CVD/PVD) |
|
|
PCB |
0100-09222 |
|
CHAMBER INTERFACE BD FOR DPS
CENTURA |
全Applied装置 |
|
|
PCB |
0100-35054 |
|
CHAMBER INTERFACE BD |
全Applied装置 |
|
|
PCB |
0100-09054 |
0100-20100 |
A I/O BOARD |
全Applied装置 |
|
|
PCB |
0090-00223 |
|
I/O EXPANSION CARD |
全Applied装置 |
|
|
PCB |
0100-09204 |
|
H2O VDSII CONTROLLER BOARD |
Centura,DPS |
|
|
PCB |
0660-00221 |
|
THERMALOGIC BOARD REPAIR |
Centura
/(Etch/T/CVD/PVD) |
|
|
PCB |
0100-38083 |
|
PCB CHAMBER
INTERCONNECT A&C |
Centura
/(Etch/T/CVD/PVD) |
|
|
PCB |
0100-76004 |
|
PCB OTF CENTER
FINDER CONTROL |
Centura
/(Etch/T/CVD/PVD) |
|
|
PCB |
0100-01985 |
|
PCB CENTER
FINDER CARD |
Centura
/(Etch/T/CVD/PVD) |
|
|
PCB |
0100-00493 |
|
PCB CHAMBER
INTERFACE 5200 HDPCVD ULTIMA |
Centura
/(Etch/T/CVD/PVD) |
|
|
PCB |
0100-00259 |
|
PCB ASSEMBLY
SERIPLEX I/O DISTRIBUTION GPLIS |
Centura
/(Etch/T/CVD/PVD) |
|
|
PCB |
0100-35231 |
|
PCB SERIPLEX I/O
DISTRIBUTION |
Centura |
|
|
PCB |
0100-18062 |
|
PCB CHAMBER TRAY
ULTIMA |
Centura |
|
|
PCB |
0100-18039 |
|
PCB TC FILTER |
Centura |
|
|
PCB |
0100-35160 |
|
PCB TC AMP
INTERLOCK DXZ |
Centura |
|
|
PCB |
0100-35217 |
|
PCB TC AMP
INTERLOCK |
Centura |
|
|
PCB |
0100-00241 |
|
PCB TC AMP
INTERLOCK 300XZ |
Centura |
|
|
PCB |
0100-35174 |
|
PCB CENTURA ACP
MATRIX |
Centura |
|
|
PCB |
0100-09287 |
|
PCB CENTURA APC
MATRIX |
Centura |
|
|
PCB |
0190-35765 |
|
PCB SERIPLEX MUX
I/O |
Centura |
|
|
PCB |
0100-35250 |
|
PCB CHAMBER
INTERFACE (DPS) |
Centura |
|
|
PCB |
0090-00224 |
|
PCB I/O
EXPANSION WITH DUAL SERIP |
Centura |
|
|
PCB |
0190-35652 |
|
PCB SERIPLEX
CHAMBER |
Centura |
|
|
PCB |
0100-20012 |
|
PCB ISOLATION
AMP |
Centura |
|
|
PCB |
0090-76133 |
|
SBC SYNERGY 6804 CPU WITH 16MB RAM (V452) |
Centura |
|
|
PCB |
0100-10707 |
|
PCB ESC
CONTROLLER CERAMIC |
Centura |
|
|
PCB |
0190-76043 |
|
PCB SYNERGY
SERIAL I/O (V440) |
Centura |
|
|
PCB |
0100-99011 |
|
GAS INTERLOCK
BOARD FOR QUANTUM |
全Applied装置 |
|
|
PCB |
0090-91938 |
9090-00419 |
PCB XR80 ARC
CONTROL DSP |
Centura,DPS |
|
|
PCB |
0100-35185 |
|
LAMP FAILURE LED
BOARD |
全Applied装置 |
|
|
PCB |
0090-90967 |
|
DAQ TYPE H PW
SUPPLY FOR QUANTUM |
全Applied装置 |
|
|
PCB |
0100-00223 |
|
PCB WH I/F MBC
AMPLIFIER |
全Applied装置 |
|
|
PCB |
799-550693-001 |
|
LAM MCC BOARD |
Lam Research |
|
|
PCB |
810-034806-104 |
|
LAM HALO/VCI INTF BOARD |
Lam Research |
|
|
PCB |
810-034821-006 |
|
LAM MOTHER BOARD |
Lam Research |
|
|
PCB |
9700-4991-01 |
|
LPT/LPI INDEXER BOARD |
AYAST |
|
|
PCB |
9700-4282-01 |
|
INX INDEXER
BOARD |
AYAST |
|
|
PCB |
6900-1448-01 |
|
CPU BOARD |
AYAST |
|
|
PCB |
3200-1077-01 |
|
AMPLIFIER/SERVO
BOARD |
AYAST |
|
|
PCB |
6900-1283-01 |
|
MOTION BOARD |
AYAST |
|
|
PCB |
0100-09172 |
|
EIGHT CHANNEL
EMISSION/LASER ENDPOINT BD |
Centura,DPS |
|
|
PCB |
4022.436.1848 |
|
Slave Box Overhaul |
ASML |
|
|
PCB |
4022.430.1422 |
|
Stepper AMP |
ASML |
|
|
PCB |
4022.435.24 |
|
Clamp Free Function |
ASML |
|
|
PCB |
4022.436.1713 |
|
Long One Board |
ASML |
|
|
PCB |
4022.436.3685 |
|
CPU Board Motorola MVME147-011 |
ASML |
|
|
PCB |
4022.436.6469 |
|
Motion Control Board |
ASML |
|
|
PCB |
4022.436.1725 |
|
Security Board |
ASML |
|
|
PCB |
4022.436.4502 |
|
PID Board |
ASML |
|
|
PCB |
4022.437.2993 |
|
Fiber Cable
Board |
ASML |
|
|
PCB |
4022.430.1235 |
|
Laser Control Board |
ASML |
|
|
PCB |
|
|
AIR Mount Controller |
ASML |
|
|
PCB |
SERV.502.28357 |
|
Demodulator Brd (ODB) |
ASML |
|
|
PCB |
4022.502.35249 |
|
Demodulator Pre-Amp Board |
ASML |
|
|
PCB |
SERV.436.48011 |
|
Voltage Regulator Board (Pcb) |
ASML |
|
|
PCB |
4022.502.20303 |
|
Blades Control Board |
ASML |
|
|
PCB |
SERV.502.27544 |
|
Power Amplifier ARMS Board (ARMS) |
ASML |
|
|
PCB |
4022.502.35193 |
|
MCDM 60/1,6 Modified Board
(Pcb) |
ASML |
|
|
PCB |
SERV.436.10945 |
|
Motion 3 WHMC 2-4 Board (Pcb) |
ASML |
|
|
PCB |
SERV.502.29285 |
|
HINDS Control Scanners Board
(Pcb) |
ASML |
|
|
PCB |
4022.502.35095 |
|
DOC/I 1721/00 (MIOS1 SLOT8)
Board |
ASML |
|
|
PCB |
SERV.502.27553 |
|
CPU MVME 167PA + BUG 167 Board |
ASML |
|
|
PCB |
SERV.437.10233 |
|
Alignment Laser Controller
RF PPCA Board |
ASML |
|
|
PCB |
4022.502.35343 |
|
MUX+DEM 5M TEP
Board |
ASML |
|
|
PCB |
SERV.436.22506 |
|
RT-VME ARMS Board (ARMS) |
ASML |
|
|
PCB |
SERV.436.10635 |
|
Motion 3 WHMC 3 Board (Pcb) |
ASML |
|
|
MODULE |
4022.455.8274 |
|
SRS R-PIN ASSY
2/ SERV.502.28708 |
ASML |
|
|
MODULE |
4022.436.33516 |
|
DIPOD HALL ASSY/
SERV.502.27466 |
ASML |
|
|
MODULE |
4022.436.15554 |
|
P-UNIT |
ASML |
|
|
MODULE |
0010-10901 |
|
MXP HV
MODULE(ESC) |
DPS |
|
|
MODULE |
0010-09933 |
0010-30139 |
DPS HV MODULE |
DPS |
|
|
MODULE |
0190-70060 |
|
W MAGNET DRIVER
ASSY |
P5000/Super E
/MXP/DPS |
|
|
MODULE |
0190-09769 |
0190-09265 |
MAGNETRON HEAD |
DPS |
|
|
MODULE |
0010-10556 |
|
DETECTOR,EDP
MONOCHROMATOR (P-5000) |
P5000 |
|
|
MODULE |
3750-01106 |
|
SMART MATCHING
ASSY |
DPS |
|
|
MODULE |
0240-34077 |
|
DETECTOR,EDP
MONOCHROMATOR(CENTURA) |
DPS |
|
|
MODULE |
0020-21699 |
0010-08185 |
ORIENTER LASER
TUBE ASSY |
全Applied装置 |
|
|
MODULE |
0010-39867 |
|
SUPER E HV
MODULE(HVMODULE ASSY POSITIVE CESC) |
Super E |
|
|
MODULE |
0010-10973 |
|
ESC POWER SUPPLY |
全Applied装置 |
|
|
MODULE |
|
|
CENTURA, MAGNET
DRIVER(AMAT) |
DPS |
|
|
MODULE |
0520-00035 |
|
ACTR RTRY 180DEG
50MMBORE W/AUTO SW & |
Super E |
|
|
MODULE |
0010-10973 |
|
HOT
PACK |
Super E/MXP |
|
|
VALVE |
0010-09968 |
|
THROTTLE VALVE上 |
Super E |
|
|
VALVE |
0010-06264 |
|
THROTTLE VALVE下 |
DPS |
|
|
VALVE |
0010-20021 |
|
SLIT VALVE TS:30073629 |
DPS |
|
|
MOTOR |
BLD424-5 |
1080-01190 |
BRUSHLESS DC MOTOR DRIVER FOR
ENDURA |
Endura |
|
|
MOTOR |
0010-13124 |
|
5 PHASE DRIVER |
DPS |
|
|
Bearing |
0010-00510 |
|
Bearing Assy |
P5000 |
|
|
INDEXER |
|
|
CENTURA LOADLOCK
INDEXER OVERHAUL |
全Applied装置 |
|
|
PUMP |
IPX-100A |
|
Edwards Dry PUMP エドワーズ |
CVD Producer |
|
|
MCA ESC |
0190-16265-001 |
|
300mm PVD MCA
Heater and shaft Assy |
|
|
|
|
|
|
|
|
|
|
|
リストに無い型番もお問い合わせ下さい。 |
|
|
|
|
|
|
|
|
|
|
|
|
|