DNS
使用装置 Parts Number 品名
EAGLE 10 23973866 Y 軸 Motor Driver
FL-820L 3912352 SOCKET FOR P.M.SENSOR
FL-820L 53905967 PHOTO MICRO SENSOR
FL-820L 53906453 CABLE
FL-820L 5F490428 BRACKET
FL-820L 73934344 THERMO CONTROLLER
FL-820L   5A616502 IPA TANK ASSY
FL-820L 53904772 THERMO COUPLE
FL-820L 73900421 FILTER FOR GAS/WGFG36WS1
FL-820L 53903392 TEFLON CHECK VALVE FT-3-K-0.5
FL-820L 873RS-JWT 水質測定デジタルモニター100V/FOXBORO
FL-820L VJ3233Y-5LOZ-X31 電磁弁
FL-820L 53950280 CTC UP/DOWN MOTOR DRIVER 
FL-820L 53901476 CTC UP/DOWN MOTOR GEAR HEAD
FL-820L 53901476 CTC UP/DOWN MOTOR GEAR HEAD
FL-820L  5F392072 PURGE TUBE 
FL-820L 53905845 LPD N2 PURGE FLOW METER
FL-820L 53904636 PNEUMATIC VALVE(KITZ SCT)
FL-820L 53904637 PNEUMATIC VALVE(KITZ SCT)
FL-820L 53908238 LPD N2 FLOW METER ELECTRICAL
FL-820L   N2 purge pipe(LPD)
FL-820L 53905705 N2 GAS HEATER 2(150C) D3-14444 
FL-820L 53905706 N2 HEATER 1(90C) D3-14445 
FL-820L  871CC-A6-4 DIELECTRIC CONSTANT SENSOR
FL-820L 53903072 O-RING 4170 V-530 
FL-820L 53905538 AIR VALVE SAV-BTSS 
FL-820L 53901897 VACUUM PUMP MEA-070 94-M-5340
FL-820L 53901264 AIR VALVE AS-5250-131TMB 
FL-820L 53902522 BEAM SENSOR MQ-WN20A-DC12-24V
FL-820L 59300841 ROTATION RING IRH93-O13 
FL-820L M8RA25GBV4L REVERSIBLE MOTOR(AC/25W/100V)
FL-820L 53902926 CYLINDER CDM2C20-125-C73-XB9 
FL-820L 53900834 CYLINDER CDMZE20-125-C73-XB9 
FL-820L 5F190825 WAFER CHUCK PVC 
FL-820L 5F190826 WAFER CHUCK PVC 
FL-820L   STEPPING MOTOR(DC/30W)UPH566TG07-A-A6
FL-820L A4663-9215TGM STEPPING MOTOR(DC/15W)
FL-820L 3906114 PRESSURE GAUGE (HISSAN)
FL-820L 3906114 PRESSURE GAUGE (HISSAN)
FL-820L   WAFER GUIDE GTL CARTRIDGE WGFG 01DSH
FL-820L 53901653 REGULATOR PCV-4240-42RVD
FL-820L 53906191 PNEUMATIC VALVE(CSB TANK)
FL-820L 53903058 PRESSURE TRANSMITTER 
FL-820L 53903058 PRESSURE TRANSMITTER 
FL-820L 73920884 PRESSURE REGULATOR (SMC)
FL-820L 73905339 THERMOCOUPLE K/JBS-8078(DNS)
FL-820L 5F191088 WAFER GUIDE PCTFE
FL-820L 5F191089 WAFER GUIDE PCTFE
FL-820L 53950615 LPD BOARD
FL-820L 53903052 VALVE AV-7290-X2(MAIN)
FL-820L 5F490376 PULLEY
FL-820L 53901005 BALL BEARING 62.8mm
FL-820L 53901005 BALL BEARING 62.8mm
FL-820L 53900755 PIN
FL-820L 5F490384 PULLEY
FL-820L 5F490385 COLLAR
FL-820L 53901499 HOSE CLAMP
FL-820L 73903630 BEARING
FL-820L 5F490886 KEY(SUS304)
FL-820L 53903198 TIMING BELT RUBBER STEEL
FL-820L 5A6011313 (WJ)LPD BOAT ASSEMBLY
FL-820L  5A6011316 LPD LIFTER 
LA820 2F302275 SIC RING 
LA820 2F403966 PACKING VITON
LA820 23938573 SYNCHRO BELT
LA820 2F405061 GUIDE(A1)8" 
LA820 2F302272 GUIDE(CP)8" 
LA820 2F404439 DUMMY GUIDE 8" 
LA820 2F303105 LIFT AEM 
LA820 2F403917 PIN 
LA820 2F302493 ARM-IH 
LA820 23949592 O-RING G-25 #4079 
LA820 23948974 O-RING(VITON)11.60*5.0 D7065
LA820 2XZ10874 8" TPS UNIT 
LA820 2VC057761 ANALOG UNIT 
LA820 23942449 AMPLIFIER 
LA820 23953032 PRESSURE SWITCH
SD-W80A-AP 23967049 UNIT DIW PRESSURE GAUGE
SD-W80A-AP 23976842 ETU CONTROLLER
SSW-80A-A 2VCR0316 SPIN BOARD ASSY
SSW-80A-A 23943197 Servo Motor(AC/300W)
SSW-80A-A 2AJ00480 MOHAIR BRUSH (10EA/SET)
SSW-80A-A 23931976 PTFE GASKET/M5
SSW-80A-A 73924440 FITTING/89-14-SUS
SSW-80A-A 2VC134264 23AGV I/O BOX 
SSW-80A-A ,AMD-11-X5-0-FL-161220 PNEUMATIC VALVE
SSW-80A-A 2F430784 SHAFT PIN/SUS 
SSW-80A-A 23966007 PNEUMATIC CYLINDER 
SSW-80A-A   (74-WA-0330)(FILTER) WGFV16D01/0.1UM
SSW-80A-A 23933785 PNEUMATIC CYLINDER 
SSW-80A-A 23922344 SOLENOID VALVE 
SSW-80A-A 2F200867 SASCEPTOR
SSW-80A-A 2F303469 QUARTZ RING 
SSW-80A-A   CHAMBER JH170V 1.7KWZ1B
リストに無い型番もお問い合わせ下さい。